Chuck faakuumka dhoobada daloolsan ee maaraynta wafer-ka qaloocan
Qalabka dhoobada ee St.Cera ee daloolada leh waxaa laga sameeyay alumina saafi ah oo heer sare ah oo leh dalool furan oo isku mid ah oo ah 30-45% iyo cabbirrada daloolada oo u dhexeeya 10 ilaa 100 μm. Si ka duwan qalabka godadka leh ee caadiga ah, dusha sare ee daloolada leh waxay bixisaa faakiyuum qaybsan oo ku baahsan dhammaan dhabarka dambe ee wafer-ka, iyadoo si wax ku ool ah u haysa wafer-ka qalloocan, khafiifka ah, ama kuwa la isku dhejiyay iyada oo aan lahayn kor u qaadis ama jabitaan gees ah. Faakiyuumka jilicsan (lagu hagaajin karo iyada oo loo marayo xaddidaha) ayaa sidoo kale ka hortagaya calaamadaynta dhinaca dambe.
Tilmaamaha(oo ku salaysan 99.6% Al₂O₃):
| Hantida | Qiimaha |
| Daloolada daloolsan | 30–45% |
| Cabbirka Celceliska Godka | 10–100 μm (la dooran karo) |
| Xoogga Dabacsanaan | ≥250 MPa |
| Fidsanaan (ka badan 300mm) | ≤5 μm |
| Dhammaadka Dusha Sare | La daboolay (Ra 0.8 μm) |
| Heerka ugu Sareeya ee Faakuumka | -80 kPa |
| Heerkulka Hawlgalka | 400°C (hawada), 600°C (aan firfircoonayn) |
| Alaab | 99.6% Al₂O₃, ZrO₂, ama SiC |
Codsiyada:
Wafer khafiif ah (≤50 μm) oo shiidi gadaal
Ku rakibidda wafer-ka qalloocan ee la jarjaray
Soo qaadis la taaban karo oo laga soo qaaday cajalad
Maareynta guddiga galaaska
Wax soo saarka iyo Tayada:
Budada dhoobada ah oo lagu qasay daloolada dabiiciga ah → la riixay → la sintered → la jiifiyay ilaa dhumucda ugu dambeysa. Jeex kasta waxaa lagu tijaabiyaa socodka si loo helo isku mid ahaanshaha faakuumka (≤5% leexasho) waxaana la hubiyaa qaybinta cabbirka daloolka (SEM). Fidsanaanta waxaa lagu cabiraa laysarka interferometer.
Faa'iidooyinka ka badan Chucks-ka jeexan:
Ma jiro calaamadaynta geeska wafer ama wareejinta dhimaha
Waxay qabataa buskud qalloocan (ilaa 500 μm qaanso)
Waxay baabi'isaa xidhitaanka godadka faakuumka
Taageero is-le'eg oo loogu talagalay substrate-yada khafiifka ah
Habayn:
Qaabab wareegsan ama leydi ah, cabbirkooduna yahay ilaa 600 mm. Waxaan ku dhejin karnaa faraantiyada shaabadeynta geesaha ama qaybaha faakuumka aagga. Noocyada birta ah ee gadaal laga soo qaaday ayaa diyaar u ah shuruudaha adkeysiga sare.
Codso muunad cabbiraadda wafer-kaaga iyo tijaabada warpage-kaaga.
