Giraan Dhoobada Alumina ee Nadiifka Sare leh ee loogu talagalay Qolalka Habka CVD / PVD
Giraangiraha dhoobada ah ee St.Cera waxaa si gaar ah loogu talagalay in loogu isticmaalo qolalka habka CVD (Kiimikada Uumiga Kala-bixinta) iyo PVD (Qalabka Kala-bixinta Uumiga Jirka). Waxaa laga soo saaray 99.8% alumina saafi ah oo sareysa (Al₂O₃), giraantani waxay u adeegtaa sidii dahaarka qolka, giraanta diiradda saarta, ama qaybta qalabka habka si loo xaddido balaasmaha loona ilaaliyo derbiyada qolka nabaad-guurka. Maaddadu waxay bixisaa iska caabin balaasmaha oo aad u fiican, xoog dielectric sare (15×10⁶ V/m), iyo xasillooni kuleyl ilaa 1600°C, taasoo hubinaysa cimri dheer oo adeeg ah oo ku jira jawi balaasmaha ku salaysan fluorine oo gardarro leh. Dulqaad cabbir oo sax ah (±0.05 mm oo ku saabsan ID/OD) iyo fidsanaan (≤10 μm) waxay suurtogal ka dhigaysaa booska geeska wafer ee joogtada ah, hagaajinta isku-dhafka dhigista iyo yaraynta soo saarista walxaha.
Tilmaamaha (ku salaysan 99.8% Al₂O₃):
| Hantida | Qiimaha |
| Alaab | 99.8% Alumina (Ceyri) |
| Cufnaanta | 3.93 g/cm³ |
| Nuugista Biyaha | 0% |
| Xoogga Dabacsanaan | 361 MPa |
| Adkaanta Jabka | 3–4 MPa·m¹/² |
| Adkaanshaha Vickers | 16 GPA |
| Modulus-ka Young | 380 GPA |
| Qaboojinta Kulaylka | 32 W/m·k |
| Ballaarinta Kulaylka (25–1000°C) | 7.2 × 10⁻⁶/℃ |
| Xoogga Dielectric | 15 × 10⁶ V/m |
| Iska caabin Gaar ah | >10¹⁴ Ω·cm |
| Heerkulka Hawlgalka ugu Badan | 1600°C |
Codsiyada:
- · Faraantiyada diiradda saaraya qolka CVD iyo faraantiyada geesaha
- · Giraangiraha gaashaanka qolka PVD iyo giraangiraha isku xidhka
- · Dahaarka qolka iyo faraantiga daboolka
- · Giraangiraha xakamaynta balaasmaha ee nidaamyada dielectric etch
Habka Wax Soo Saarka:
Riixitaanka Isostatic → mashiinka cagaaran → sintering heerkul ah 1600°C → CNC ID/OD shiidi → dusha sare ee laalaabka → nadiifinta ultrasonic → 100% kormeerka CMM. Dhammaystirka dusha sare ee aadka u siman (Ra ≤0.4 μm) wuxuu yareeyaa isku dhejinta walxaha.
Xakamaynta Tayada:
- · Hubinta cabbirka 100% (Aqoonsiga, OD, dhumucda, fidsanaanta)
- · Baarista rinjiga ee daloolada yar yar ee dusha sare
- · Tijaabada xoogga Dielectric sida waafaqsan ASTM D149
- · Ma jiro midab-beddel ama daloolo muuqda oo ka hooseeya mikroskoobka 20×
Faa'iidooyinka ka badan Faraantiga Birta ama Quartz:
- · 5–10× cimri dheer marka loo eego giraangiraha aluminiumka ee ku jira balaasmaha fluorine
- · Ma jirto wasakhayn bir ah oo ku jirta filimada khafiifka ah
- · Iska caabin balaasma oo ka sarreysa quartz (godad nabaad-guur ma jiraan)
- · Waxay ilaalisaa dahaarka korontada >10¹⁴ Ω·cm xitaa ka dib isticmaalka muddada dheer
Maaddooyin Kale — Silicon Nitride (Si)₃N₄):
Codsiyada u baahan adkaanta jabka oo aad u sarreysa (6.2 MPa·m¹/²) iyo iska caabinta shoogga kulaylka oo ka wanaagsan (isku-darka fidinta 3.2×10⁻⁶/℃), giraanta Si₃N₄ ayaa la heli karaa. Si kastaba ha ahaatee, alumina waxay kharash badan ku tahay inta badan codsiyada CVD/PVD. Fadlan sheeg doorbidka agabka marka aad dalbanayso.
Habayn:
- · Godadka dhex mara, astaamaha jaranjarada, ama mindiyaha lagu dhejiyo
- · Dusha sare ee dahaarka leh ee Y₂O₃ si loo xoojiyo iska caabbinta balaasmaha (ikhtiyaar)
- · Qorista laysarka ee lambarka qaybta / koodhka qaybta
Fiiro gaar ah:Xogta kor ku xusan waxay si adag u raacaysaa jadwalka hantida Al₂O₃ ee la bixiyay. Wixii ku saabsan giraanta Si₃N₄, tixraac xaashida xogta ee Si₃N₄ ee gaarka ah ee la bixiyay.
