Saxanka Qaybinta Gaaska Alumina ee loogu talagalay Madaxa Musqusha ee CVD/PVD
Saxanka qaybinta gaaska ee St.Cera (madaxa qubeyska) waxaa si sax ah loogu farsameeyay nadiifnimo sare oo ah 99.8% alumina. Waxay leedahay godad yaryar (dhexroor 0.3–1.5 mm) kuwaas oo hubiya socodka gaaska ee isku midka ah ee dusha sare ee wafer-ka inta lagu jiro hababka CVD, PVD, ama ALD. Xoogga dielectric sare ee saxanka (>15×10⁶ V/m) iyo iska caabbinta balaasmaha ayaa ka dhigaya mid lagama maarmaan u ah dhigista filimka khafiifka ah ee semiconductor-ka.
Tilmaamaha:
| Hantida | Qiimaha |
| Alaab | 99.8% Al₂O₃ ama SiC |
| Dhexroorka | 100 - 1500mm (wareeg) ama leydi |
| Dhumucda | 5 – 20 mm |
| Dhexroorka Godka | 0.3 – 1.5 mm |
| Qaabka Godka | Gaar ah (saddex-xagal, afar-geesood, radial) |
| Fidsanaan | ≤10 μm marka loo eego bedka buuxa |
| Qalafsanaanta Dusha sare | Ra ≤0.6 μm (dhinaca gaaska) |
| Saamiga Aagga Furan | 5–15% |
Codsiyada:
Taarikada madaxa qubeyska ee PECVD
Cirbadaha gaaska ALD
Taarikada qaybinta gaaska ee qolka Etch
Qaybaha fal-galka MOCVD
Wax soo saarka:
Substrate-ka Alumina oo si siman loo dahaadhay → Qoditaanka CNC oo leh qalab dheeman lagu dahaadhay (dulqaad booska godka ±0.02 mm) → nadiifinta → nadiifinta ultrasonic → Baakadaha Fasalka 100.
Xakamaynta Tayada:
Saxan kasta waxaa 100% laga baarayaa cabbirka daloolka (nidaamka aragga), fidsanaanta (laser interferometer), iyo isku mid ahaanshaha socodka gaaska (khariidaynta cadaadiska). Ma jiraan dildilaacyo yaryar oo ka hooseeya mikroskoobka 20x.
Faa'iidooyinka ka badan Taarikada Birta ah:
Wasakhayn bir ah kuma jirto filimada khafiifka ah
Soo saarista walxaha hoose (ma jiraan jajabyo daxal leh)
Waxay u adkaysataa nadiifinta balaasmaha adag (CF₄, NF₃)
Sifooyinka Gaarka ah:
Kanaallada gaaska ee gadaal, godadka ka soo horjeeda caajiska, shaabadaha geeska, iyo heerarka kala duwan ee walxaha (SiC si loo helo kuleyl badan, dahaarka Y₂O₃ si loo helo iska caabbinta balaasmaha).
Waxaan bixinaa xaqiijinta CAD iyo jilitaanka socodka ka hor inta aan la soo saarin.
