Qaboojiyaha faakuumka ee birta ah ee loo yaqaan 'SiC' oo leh daloolo si loogu maareeyo Wafer-ka qaloocan iyo khafiifka ah
Qalabka faakiyuumka dhoobada ah ee birta ku salaysan ee St.Cera wuxuu isku daraa lakab dhoobo ah oo silicon carbide ah (SiC) ah oo leh saldhig bir ah oo si sax ah loo farsameeyay (aluminium ama bir aan miridh lahayn). Qalabka daloolada leh ee SiC (buluug-madow, daloolada 35-40%, cabbirka daloolada 20-30 μm, daloolada 60 ml/cm²·min) wuxuu bixiyaa qaybin faakiyuum oo siman, oo jilicsan oo ku baahsan dusha sare ee wafer-ka oo dhan, isagoo meesha ka saaraya calaamadaynta geeska oo awood u siinaya taageero aan la taaban karin oo loogu talagalay wafer khafiif ah (≤100 μm) ama wafers qalloocan. Lakabka SiC wuxuu bixiyaa ballaarin kuleyl oo hooseeya (3.5×10⁻⁶/℃), xasillooni kuleyl ilaa 1000°C, iyo xoog dabacsan oo dhexdhexaad ah (32-35 MPa). Saldhigga birta wuxuu ku darayaa adkeysi qaab dhismeed, rakibid fudud iyada oo loo marayo godad dun ah, iyo ilaalin ka dhan ah jabka jilicsan. Qalabkani wuxuu ku habboon yahay shiididda dambe, jarista, iyo habaynta wafer-ka heerkulka sare leh halkaas oo faakiyuum isku mid ah iyo iswaafajinta kuleylka ay muhiim yihiin.
Tilmaamaha (iyadoo lagu saleynayo xogta SiC ee daloolsan ee la bixiyay):
| Hantida | Qiimaha |
| Qalabka Dhoobada | Kaarboohaydraytka Silikoon ee daloolsan (SiC ≥80%) |
| Midab | Buluug-madow |
| Daloolada daloolsan | 35–40% |
| Cabbirka daloolka | 20–30 μm |
| Cufnaanta | 2.1–2.3 g/cm³ |
| Joogto ah | 60 ml/cm²·daqiiqad |
| Xoogga Dabacsanaan | 32–35 MPa |
| Isugeynta Ballaarinta Kulaylka (25-1000°C) | 3.5 × 10⁻⁶/℃ |
| Heerkulka Hawlgalka ugu Badan | 1000°C |
| Iska caabinta Korontada | 10⁻¹⁰ Ω/cm (xogta la bixiyay, sida caadiga ah ee SiC-ga daloolsan) |
| Qalabka Saldhigga Birta ah | Aluminium 6061 ama Bir aan daxal lahayn 304 (ikhtiyaar) |
| Dhumucda Saldhigga Birta ah | 10–30 mm (gaar loo sameeyay) |
Fiiro gaar ah: Xoogga dabacsanaantu wuu ka hooseeyaa SiC cufan sababtoo ah daloolada. Astaamaha saldhigga birta kama soo baxaan miisaska dhoobada.
Codsiyada:
- · Shiidida dambe ee buskudka khafiifka ah (≤100 μm)
- · Ku rakibidda wafer-ka qalloocan ee loogu talagalay laalaabashada
- · Kuleylka heerkulka sare leh (ilaa 1000°C)
- · Ku rakibidda faakuumka walxaha daloolada leh ama jilicsan
Wax soo saarka:
Saxanka daloolada leh ee SiC (oo lagu sameeyay qaab-dhismeed daloolo, oo sintered) → oo si siman u siman ≤10 μm → saldhig bir ah oo lagu farsameeyay dekedo faakiyuum ah iyo astaamo rakiban → isku xidhka epoxy ama isku xidhka farsamada → tijaabada daadinta helium.
Xakamaynta Tayada:
- · Cabbirka daloolada iyo daloolada waxaa xaqiijiyay SEM
- · Tijaabada Joogtada ah (socodka hawada)
- · Fidsanaantiisa oo lagu cabbiray laysarka interferometer
- · Heerka daadashada helium <1×10⁻⁹ Pa·m³/s
Faa'iidooyinka ka badan Jeexjeexyada dhoobada ee la jeexay ama cufan:
- · Calaamadaynta buffer-ka ma jirto - faakiyuum isku mid ah oo aan lahayn godad gooni ah
- · Godadka is-nadiifinta - xidhmidda oo yaraata
- · Waxay qabataa buskud qalloocan (ilaa 500 μm qaanso)
- · Saldhig bir ah ayaa ka hortagaya jabka jilicsan wuxuuna fududeeyaa isdhexgalka
Xaddidaadaha:
- · Xoogga dabacsanaanta oo hooseeya (32–35 MPa) – iska ilaali rarista saameynta
- · Heerkulka hawlgalka wuxuu ku xaddidan yahay 1000°C (SiC daloolo leh), laakiin isku xidhka epoxy-ga salka birta ah wuxuu ku xaddidan yahay ≤200°C haddii aan si farsamo ahaan loo xirin
- · Looma isticmaalo faakuumka cadaadiska sare leh (qaab-dhismeedka daloolada leh wuxuu xaddidayaa kala duwanaanshaha ugu badan ee faakuumka)
Habayn:
- · Saldhig bir ah: aluminium (fudud), bir aan miridh lahayn (u adkaysta daxalka), Invar (ballaarinta hoose)
- · Isku xidhnaan: epoxy (≤200°C) ama qalab farsamo (ilaa 500°C)
- · Giraanta shaabadeynta geeska si loogu xakameeyo faakuumka aagga
Fadlan ogow: Xoogga laalaaban karo ee la bixiyay (32–35 MPa) aad ayuu uga hooseeyaa dhoobada cufan sababtoo ah daloolada. Si taxaddar leh u qabo si aad uga fogaato jajabka geeska.
