Saameeyaha Dhammaadka Dhoobada ee Alumina ee Nadiifka Sare leh ee Robot-yada Maareynta Wafer
Qalabka wax soo saarka dhammaadka dhoobada ee St.Cera waxaa lagu farsameeyaa saxnaanta 99.8% Al₂O₃ oo saafi ah iyadoo la adeegsanayo qalabka shiididda CNC ee 5-axis ee horumarsan. Awoodahayaga wax soo saarka waxaa ka mid ah mashiinnada shiididda saxda ah iyo xarumaha mashiinka CNC, taasoo suurtogalinaysa joomatari isku dhafan oo leh saxnaan sare. Qalabka wax soo saarka dhammaadka wuxuu leeyahay muuqaal khafiif ah (sida khafiifka ah 1.5 mm) oo leh gees hoggaamineed oo qallafsan si loogu geliyo wafer siman. Maaddadu waxay bixisaa adkaansho sare (modulus Young 380 GPa), iska caabin aad u fiican oo xirasho ah, iyo xasillooni kuleyl ilaa 800 ° C. Cutub kasta waa la shiiday si sax ah si loo gaaro fidsanaan 0.003mm, barbardhig ahaan 0.002mm, iyo dhammaystirka dusha sare ee Ra0.1, taasoo hubinaysa xiriir wafer oo joogto ah iyo hawlgal aan lahayn walxaha ku jira deegaannada semiconductor FAB. Waxaa laga heli karaa dherer ahaan laga bilaabo 150 mm ilaa 450 mm, oo leh joomatari caaradda gaarka ah (qabashada geeska, Bernoulli, fidsan) iyo flanges rakiban si ay ugu habboonaadaan robotyada OEM. Xulashooyinka dhammaystirka dusha sare waxaa ka mid ah dahaarka la safeeyey, la safeeyey, ama ESD ee kala firdhisan (10⁶–10⁹ Ω/sq).
Tilmaamaha (ku salaysan 99.8% Al₂O₃& Awoodaha wax soo saarka ee St.Cera):
| Hantida | Qiimaha |
| Alaab | 99.8% Alumina (Ceyri) |
| Cufnaanta | 3.93 g/cm³ |
| Xoogga Dabacsanaan | 361 MPa |
| Adkaanshaha Vickers | 16 GPA |
| Modulus-ka Young | 380 GPA |
| Fidsanaan | 0.003mm |
| Isbarbardhigga | 0.002mm |
| Dhammaadka Dusha Sare | Ra0.1 (la dahaadhay/la safeeyey) |
| Heerkulka ugu Sareeya ee Hawlgalka | 800°C |
| Kala Duwanaanta Dhererka | 150–450 mm |
Codsiyada:
- · Wafer-ka wareejinta ee robot-yada faakuumka iyo jawiga
- · Wax-soo-saareyaasha dhammaadka otomaatiga ah ee FAB ee loogu talagalay 200mm/300mm wafers
- · Maareynta wafer khafiif ah (oo leh ikhtiyaarka ESD)
Awoodaha Wax Soo Saarka:
Mashiinnadayada shiidi saxda ah iyo xarumaha wax lagu farsameeyo ee CNC waxay suurtogal ka dhigayaan soo saarista qaybaha dhoobada ee adag iyadoo la adeegsanayo:
- · Dhererka ugu badan ee makiinada: 1500mm
- · Dhexroorka ugu badan ee dibadda: 600mm
- · Dhexroorka ugu yar ee gudaha: 0.2mm
- · Dhumucda ugu badan: 100mm
Xakamaynta Tayada:
Toosnaan 0.005mm, toosan 0.005mm, wareegsan 0.002mm, barbardhac 0.002mm, isku-dhafan 0.01mm oo ay xaqiijisay CMM. Cutub kasta waxaa lagu nadiifiyay ultrasonic waxaana lagu duubay qolka nadiifka ah ee Fasalka 100.
