12-Inch Alumina Vacuum Chuck oo loogu talagalay 300mm Wafer Processing
Qalabka faakiyuumka ee St.Cera oo ah 12-inji ayaa si sax ah loo farsameeyay laga bilaabo 99.8% alumina saafi ah oo sareysa (Al₂O₃) si loogu maareeyo 300mm wafer. Qalabka faakiyuumka wuxuu leeyahay dusha sare oo jeexan (ballaca godka 0.5–1.0 mm, dhererka 2–3 mm) si loo hubiyo qaybinta faakiyuumka oo isku mid ah dhexroorka 300mm oo dhan. Fidsanaantiisa waxaa lagu hayaa 5 μm gudahood, taasoo suurtogalinaysa in la hagaajiyo wafer aan lahayn wafer inta lagu jiro jarista, shiidida gadaal, iyo kormeerka. Xoogga dabacsanaanta sare ee walxaha (361 MPa) iyo adkaanta (16 GPa) waxay dammaanad qaadayaan xasillooni cabbir muddo dheer ah xitaa marka lagu jiro wareegyada faakiyuumka ee soo noqnoqda.
Tilmaamaha (oo ku salaysan 99.8% Al₂O₃):
| Hantida | Qiimaha |
| Dhexroorka | 300 mm (12 inji) |
| Alaab | 99.8% Alumina (Ceyri) |
| Cufnaanta | 3.93 g/cm³ |
| Xoogga Dabacsanaan | 361 MPa |
| Adkaanshaha Vickers | 16 GPA |
| Fidsanaan (ka badan 300mm) | ≤5 μm |
| Ballaca Godka | 0.5–1.0 mm |
| Heerkulka ugu Sareeya ee Hawlgalka | 800°C |
| Xoogga Dielectric | 15 × 10⁶ V/m |
Codsiyada:
300mm jeexitaan iyo qoritaan wafer ah
Shiidida dambe ee Wafer (taageerada Wafer-ka khafiifka ah)
Baaritaanka indhaha iyo baaritaanka
Xidhmo ku meel gaar ah/ka-saarid qalab
Wax soo saarka:
CNC waa la shiday oo la dhigay ilaa uu si kama dambays ah u fidsan yahay, waxaa lagu googooyay giraangiraha dheemanka, si ultrasonic ah ayaa loo nadiifiyay, waxaana lagu baakadeeyay qolka nadiifka ah ee Fasalka 100. Jeex kasta waxaa 100% laga baarayaa fidsanaanta (laser interferometer) iyo qoto dheer ee jeexdinta (profilometer).
Faa'iidooyinka:
Soo saarista walxaha yaryar (≤0.05 walxood/cm²)
Si kiimiko ah ugu dhex milma dareerayaasha iyo asiidhyada
Dusha sare ee badbaadada leh ee ESD (iska caabin > 10¹³ Ω·cm)
Qaababka godadka faakuumka ee gaarka ah iyo dekedaha gadaal ayaa la heli karaa.
