Jaakad faakiyuum ah oo ku salaysan Silicon Carbide (SiC) oo loogu talagalay Heerkulka Sare iyo Deegaannada Balaasmaha
Qalabka dhoobada ah ee ku salaysan St.Cera ee SiC waxaa laga sameeyay carbide silicon ah oo saafi ah (dufcad S1111, SiC 99.72%, Si bilaash ah 0.05%). Waxay bixisaa xoog dabacsan oo la cabbiray oo ah 449 MPa, adkaanta jabka oo ah 3.12 MPa·m¹/², iyo modules dabacsan oo ah 457 GPa. Qabsashada kulaylka caadiga ah ee walaxda (120–150 W/m·K) iyo ballaarinta kulaylka oo hooseysa (4.0–4.5×10⁻⁶/℃) waxay suurtogal ka dhigaysaa kor u kaca heerkulka degdega ah iyo warpage yar oo wafer ah inta lagu jiro wareegga kulaylka. Qalabka waxaa loo habeyn karaa sidii qalab faakiyuum ah oo daloolsan (socodka gaaska oo isku mid ah) ama qalab caadi ah oo godad leh. Iyada oo leh heerkul isticmaal ugu badan oo ah 1600–1700°C (rarid la'aan) iyo iska caabin nabaad-guurka plasma oo aan caadi ahayn, qalabkani wuxuu ku habboon yahay farsamaynta wafer heerkulka sare (annealing, RTP) iyo qolal xoqan oo qallafsan halkaas oo walxaha alumina ay hoos u dhacaan.
Tilmaamaha(iyadoo lagu saleynayo warbixinta tijaabada SiC S1111 ee la bixiyay iyo qiimayaasha caadiga ah)):
| Hantida | Qiimaha |
| Alaab | SiC (99.72% SiC, 0.05% Si Bilaash ah) |
| Cufnaanta | 3.10–3.15 g/cm³ |
| Nuugista Biyaha | 0% |
| Xoogga Dabacsanaan | 449 MPa |
| Adkaanta Jabka | 3.12 MPa·m¹/² |
| Modulus Laablaaban | 457 GPA |
| Adkaanshaha Vickers | 25–28 GPA |
| Qaboojinta Kulaylka | 120–150 W/m·K |
| CTE (25–1000°C) | 4.0–4.5 × 10⁻⁶/℃ |
| Heerkulka ugu badan ee Isticmaalka (ma jiro culays) | 1600–1700°C |
| Fidsanaan (ka badan 300mm) | ≤5 μm |
| Dhammaadka Dusha Sare | Ra ≤0.4 μm (la dahaadhay) |
Codsiyada:
● Qabsashada heerkulka sare (buufinta, RTP, koritaanka epitaxial)
● Baakad lagu xoqo balaasmaha oo leh iska caabin sare oo fluorine ah
● Qabashada buskudka khafiifka ah oo leh kuleyl/qaboojin isku mid ah
● Jeex daloolo leh oo loogu talagalay taageerada wafer-ka aan la taaban
Wax soo saarka:
SiC sintering → shiididda saxda ah ee fidsanaan iyo muuqaalka dusha sare → sameynta qaab-dhismeedka daloolsan ee ikhtiyaariga ah (loogu talagalay mashiinka faakiyuumka) → lapping → nadiifinta ultrasonic. Chuck kasta waxaa 100% lagu hubiyaa fidsanaan (laser interferometer) iyo isku mid ahaanshaha faakiyuumka (tijaabada socodka).
Xakamaynta Tayada:
● Hubinta cabbirka CMM (dhexroorka, dhumucda, booska godadka)
● Cabbirka fidsanaan sida ku cad ASTM
● Tijaabada daadinta Helium (loogu talagalay qalabka faakiyuumka)
● Xaqiijinta xoogga dabacsanaanta dufcaddiiba (warbixinta tijaabada ee tixraaca)
Faa'iidooyinka ka badan Alumina Chucks:
● Gudbinta kulaylka oo sareysa (120–150 vs 32 W/m·K ee aluminium) – 4× wareejinta kulaylka oo dhakhso badan
● CTE-ga oo hooseeya (4.0 vs 7.2×10⁻⁶/℃) – wuxuu yareeyaa cadaadiska kulaylka ee wafer-ka
● Iska caabin balaasma oo heer sare ah - 10× cimri dheer oo ku jira foloraydh
● Heerkulka ugu badan ee isticmaalka (1600°C vs 800°C alumina)
Habayn:
● Dusha daloolsan ama godad leh
● Dhexroorka 100–450 mm, wareegsan ama afar geesle ah
● Giraanta shaabadeynta geeska ama qaybaha faaruqinta aagga
● Ikhtiyaar bir ah oo loogu talagalay rakibidda adkeysi sare
Dhammaan xogta farsamada ee kor ku xusan waxay ka timid warbixinta tijaabada ee la bixiyay (dufcadda S1111). Qiimaha kulaylka iyo adkaanta ayaa caadi u ah heerkan SiC. Qalabka daloolada leh ee SiC waxay u baahan yihiin habayn dheeraad ah; fadlan weydii helitaanka daloolada gaarka ah iyo cabbirka daloolada.
